The Design and Construction of a Surface Analysis Station (Part A)

Abstract

<p> The design, construction, and initial operation of a surface analysis station were undertaken. The final UHV system is equipped for ion surface scattering, low energy electron diffraction, Auger analysis, secondary ion mass spectroscopy and residual gas analysis. </p> <p> The main goal of this project was the preliminary operation of the ion surface scattering equipment. A complete beam transport system was constructed utilizing an Einzel lens and electrostatic quadroles. </p> <p> The ion surface scattering was effected through the use of a time-of-flight (TOF) technique to obtain an energy spectrum of particles backscattered from a target surface. The TOF spectrum and subsequent energy spectrum were for 5.1 keV hydrogen ions incident on a practical silver target. </p>