Please use this identifier to cite or link to this item:
http://hdl.handle.net/11375/12476
Title: | Tunable Focused X-rays For Patterning and Lithography |
Authors: | Leontowich, Adam F.G. |
Advisor: | Hitchcock, Adam P. Andrew P. Knights, Harald D.H. Stöver |
Department: | Chemistry and Chemical Biology |
Keywords: | lithography;radiation damage;x-ray optics;synchrotron;NEXAFS;microscopy;Physical Chemistry;Physical Chemistry |
Publication Date: | Oct-2012 |
Abstract: | <p>Scanning transmission x-ray microscopes (STXM) focus monochromatic x-rays into an intense sub-30 nm diameter spot. Samples are then positioned at the focal plane and raster scanned through the spot while the transmitted x-rays are acquired to build up images at x-ray photon energies. In addition, x-ray absorption spectroscopy (XAS) can be performed by recording image sequences over a photon energy range of interest. STXMs excel at characterizing thin sections of inhomogeneous soft matter with their combination of high spatial (<30 nm) and photon energy (<0.1 eV) resolution. However, the overarching theme of this thesis is to apply the intense, tightly focused spot of x-rays to induce spatially resolved chemical and physical changes, and directly pattern materials, primarily thin polymer films. The irradiated areas are then investigated using several types of microscopy (scanning transmission x-ray, atomic force, scanning electron) and XAS. The experiments cover three broad areas: i) Nanofabrication; realization of the smallest possible feature sizes, and fabrication schemes unique to focused x-rays with applications including nanofluidics. ii) Radiation chemistry and physics; investigating the mechanisms of radiation-induced processes such as bond formation/loss, morphological change, carbon contamination, and temperature increase. iii) X-ray optics; the spatial distribution of x-rays at a focal plane can be recorded in a thin polymer film and later read out using an atomic force microscope. Applications include feedback for optics fabrication and enhanced image processing, the ultimate goal being increased spatial resolution.</p> |
URI: | http://hdl.handle.net/11375/12476 |
Identifier: | opendissertations/7360 8411 3319976 |
Appears in Collections: | Open Access Dissertations and Theses |
Files in This Item:
File | Size | Format | |
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fulltext.pdf | 17.02 MB | Adobe PDF | View/Open |
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