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http://hdl.handle.net/11375/12476
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DC Field | Value | Language |
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dc.contributor.advisor | Hitchcock, Adam P. | en_US |
dc.contributor.advisor | Andrew P. Knights, Harald D.H. Stöver | en_US |
dc.contributor.author | Leontowich, Adam F.G. | en_US |
dc.date.accessioned | 2014-06-18T16:59:47Z | - |
dc.date.available | 2014-06-18T16:59:47Z | - |
dc.date.created | 2012-09-13 | en_US |
dc.date.issued | 2012-10 | en_US |
dc.identifier.other | opendissertations/7360 | en_US |
dc.identifier.other | 8411 | en_US |
dc.identifier.other | 3319976 | en_US |
dc.identifier.uri | http://hdl.handle.net/11375/12476 | - |
dc.description.abstract | <p>Scanning transmission x-ray microscopes (STXM) focus monochromatic x-rays into an intense sub-30 nm diameter spot. Samples are then positioned at the focal plane and raster scanned through the spot while the transmitted x-rays are acquired to build up images at x-ray photon energies. In addition, x-ray absorption spectroscopy (XAS) can be performed by recording image sequences over a photon energy range of interest. STXMs excel at characterizing thin sections of inhomogeneous soft matter with their combination of high spatial (<30 nm) and photon energy (<0.1 eV) resolution. However, the overarching theme of this thesis is to apply the intense, tightly focused spot of x-rays to induce spatially resolved chemical and physical changes, and directly pattern materials, primarily thin polymer films. The irradiated areas are then investigated using several types of microscopy (scanning transmission x-ray, atomic force, scanning electron) and XAS. The experiments cover three broad areas: i) Nanofabrication; realization of the smallest possible feature sizes, and fabrication schemes unique to focused x-rays with applications including nanofluidics. ii) Radiation chemistry and physics; investigating the mechanisms of radiation-induced processes such as bond formation/loss, morphological change, carbon contamination, and temperature increase. iii) X-ray optics; the spatial distribution of x-rays at a focal plane can be recorded in a thin polymer film and later read out using an atomic force microscope. Applications include feedback for optics fabrication and enhanced image processing, the ultimate goal being increased spatial resolution.</p> | en_US |
dc.subject | lithography | en_US |
dc.subject | radiation damage | en_US |
dc.subject | x-ray optics | en_US |
dc.subject | synchrotron | en_US |
dc.subject | NEXAFS | en_US |
dc.subject | microscopy | en_US |
dc.subject | Physical Chemistry | en_US |
dc.subject | Physical Chemistry | en_US |
dc.title | Tunable Focused X-rays For Patterning and Lithography | en_US |
dc.type | dissertation | en_US |
dc.contributor.department | Chemistry and Chemical Biology | en_US |
dc.description.degree | Doctor of Philosophy (PhD) | en_US |
Appears in Collections: | Open Access Dissertations and Theses |
Files in This Item:
File | Size | Format | |
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fulltext.pdf | 17.02 MB | Adobe PDF | View/Open |
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