Bragg Grating Integrated on Silicon-on-Insulator Waveguide

Abstract

This thesis details the design, fabrication and measurement of an integrated optical Bragg grating filter, operating at a free space wavelength of 1532 nm, based on silicon-on-insulator (SOI) ridge waveguide. Grating-based integrated devices can interact with optical signals in photonic integrated circuits (PIC) in such a way as to selectively transmit, reflect or detect the signals that are resonant with these devices. Channel filters can access one channel of a wavelength division multiplexed signal without disturbing the other channels and are therefore important elements in WDM communications. Resonator filters are attractive candidates because they can potentially realize the narrowest linewidth for a given device size. Device models for this kind of device are developed by using the MATLAB programming language. Coupled mode theory (CMT) for filters, and the effective index method (EIM) which reduces a three dimensional (3D) analysis into two dimensions is used as modeling theoretical background. Computer modeling identifies the effect of device structure on the performance of the devices, and is also used to predict the output characteristics of this kind of device. This provides an understanding of device physics and operation, and a basis for comparison with experimental results. A common fabrication sequence for integrated optical Bragg grating filters based on SOI ridge waveguides is designed, developed and demonstrated. This includes the photomask for optical ridged waveguide, interferometic lithography for grating pattern and high accuracy RIE etching. This work demonstrates Bragg grating as a technology for realizing PIC in SOI material system, and presents the technology required to design, fabricate, characterize, and model these integrated devices.