The Design and Construction of a UHV Test System to Evaluate A Magnetron Pump-Gauge (Part B)

Abstract

<p> The design, construction, and initial operation of an ultra high vacuum testing system was undertaken. The final UHV system is equipped with a residual gas analyser (RGA). </p> <p> The system was used to test a National Research Council of Canada magnetron pump-gauge. The pumping action of the device was adequate with speeds of litres/second for hydrogen and other chemically active species. A speed of ≃0.3 L/S was measured for methane (CH₄). The pressure measuring capabilities of this particular pump may be in question due to the presence of surface leakage currents. </p>