Interferometric Photonic Sensors in Silicon-On-Insulator Waveguides

Abstract

<p> An optical temperature sensor and Fourier spectrometer, working in the 1550nm telecommunications wavelength range, were fabricated in silicon-on-insulator. Both devices were based on asymmetric Mach-Zehnder Interferometer waveguide geometries. The temperature sensor underwent a two phase design. The various asymmetry factors, due to different path length differences, of the Mach-Zehnder arms resulted in different levels of temperature sensitivity, which in turn was the driving mechanism behind the Fourier spectrometer. Due to the asymmetry of the Mach-Zehnder arms, there exists an inherent optical path length difference which is further changed with temperature variation due to the thermo-optic effect. The phase I temperature sensor showed an accuracy of 1-2°C and a sensitivity of 0.5°C for ΔL of 37.23μm and 23.46μm, respectively. The phase II temperature sensor design, which allowed for self normalization, resulted in a 1°C temperature accuracy and a 0.5°C sensitivity for a ΔL of 27.85μm. Both the phase I and II temperature sensors showed repeatable and stable results for the temperature range of 20-100°C, and agreed well with the theoretical design performance. Upon analysis of the highly asymmetric Mach-Zehnder designs it was found that both the 1.05cm and 3.05cm path length differences resulted in a temperature accuracy of 0.1°C, with a 0.05°C sensitivity over a small temperature range.</p> <p> The Fourier spectrometer exhibited decent agreeability with theoretical design performance and demonstrated proof of concept. A 1.05cm path length difference was insufficient to resolve two wavelengths at 1546.12nm and 1564.68nm, which agreed with the theoretical model. However, the 3.05cm ΔL was sufficient to resolve the two wavelengths in a repeatable manner.</p>