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http://hdl.handle.net/11375/16881
Title: | Nitrogen Implanted α-SiC : A Correlation Between Electrical (C-V) Measurements and Damage Studies Using the Channeling Technique. |
Authors: | Chan, Albert M. C. |
Advisor: | Thompson, D.A. |
Department: | Engineering Physics |
Keywords: | SiC, implanted, annealing, nitrogen, electrically, C-V, |
Publication Date: | 1975 |
Abstract: | <p>The annealing behaviour of 15N implanted, aluminum doped-SiC has been studied by measuring the differential capacitance as a function of applied bias. The samples were doubly implanted at 450°c with 45 Kev and 25 Kev ions, for a dose of 10^16/cm^2 at each energy.</p> <p> An n-i-p structure with a thick insulator region was found after annealing at 1000°c. The thickness of this i region could be substantially reduced with additional annealing at higher temperatures, and a fairly good n-p junction was obtained after 1480°c anneal.</p> <p> About 20-30% of the implanted nitrogen ions were found to be electrically active.</p> <p> The C-V behaviour was found to have large variations with the a.c. measuring frequency.</p> |
Description: | Part A of two Project Reports; Part B can be found at: http://hdl.handle.net/11375/17691 |
URI: | http://hdl.handle.net/11375/16881 |
Appears in Collections: | Open Access Dissertations and Theses |
Files in This Item:
File | Description | Size | Format | |
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Chan Albert.pdf | 2.73 MB | Adobe PDF | View/Open |
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