High Speed Interdigital MSM Photodiodes

Abstract

<p>A fast, simple photodetector which is compatible with optical integration techniques can be produced using a design consisting of an interdigital metal -- semiconductor -- metal (MSM) photodiode. The general operation of these devices is discussed with emphasis placed on basic device characteristics such as IV, CV, and steady state and pulsed light response. Ideas and models are presented to allow predictions of generic device performance as well as design and optimization of specific devices. These theoretical aspects are validated through comparison with experimental results.</p>