Please use this identifier to cite or link to this item:
http://hdl.handle.net/11375/20604| Title: | ON-MACHINE MEASUREMENT OF WORKPIECE FORM ERRORS IN ULTRAPRECISION MACHINING |
| Authors: | Gomersall, Fiona |
| Advisor: | Veldhuis, Stephen |
| Department: | Mechanical Engineering |
| Keywords: | on-machine measurement of workpiece form errors in ultraprecision machining, on machine measurement of workpiece form errors in ultraprecision machining, on machine measurement of work piece form errors in ultraprecision machining, on-machine measurement of work piece form errors in ultraprecision machining, on-machine measurement of workpiece form errors in ultra precision machining, on-machine measurement of work piece form errors in ultra precision machining, on machine measurement of work piece form errors in ultra precision machining, online measurement of work piece form errors in ultraprecision machining, online measurement of workpiece form errors in ultraprecision machining, online measurement of work piece form errors in UPSPDT machining, nanometrology, on-machine measurement of work piece form errors in UPSPDT machining, metrology, on-machine, on machine, nano-metrology, online, offline, measurement, UP-SPDT, UP, UPSPDT, SPDT, ultra-precision, ultraprecision, machining, metrology, surface finish, form error, spatial frequency, work piece, workpiece, production, manufacturing, laser interferometry, lion precision, Lion Precision, capacitance, high resolution, capacitor, machine, vacuum chuck, interferometer, Fiona Gomersall, Gomersall, Veldhuis, Stephen Veldhuis, optics, photonics, ultraprecision single point diamond turning, diamond turning, differential, differential screw, high resolution sensor, sensor, FFT, fast fourier transform, derivative, signal processing, error band, resolution, data acquisition, micro-machining, micromachining, precision machining, precision, machine system, charge, static charge, diamond, diamond tool, indicator, electronic indicator, tactile probe, touch probe, engineering, mechanical, mechanical engineering, LVDT, signal conditioning, ICS, bandwidth, capacitance system interface, optical sensor, DAQ, sampling, high spatial frequency, low spatial frequency, optical components, vibration, spindle vibration, dominant frequency, machine vibration, mechanical vibration, phase, phase lag, ogive, kinematic error, abbe error, centering, linear regression, deformation, residual stress, filtering, moving average filter, moving average, rolling average, box average, running average, normal distribution, Gaussian distribution, standard deviation, filters, low pass filter, high pass filter, frequency response, filter, electronic noise, noise, dc component, cutting plane, lathe, turning, fixture, workpiece fixture, work piece fixture, sampling error, bin resolution, bandpass, frequency spectrum, measurement system, measurement error, kinematics, online surface finish measurement, on machine surface finish measurement, online surface form error measurement, on machine surface form error measurement, on machine measurement, online measurement, quality control, automated quality control, ultraprecision surface finish measurement, ultraprecision form error measurement, precision surface finish measurement, precision form error measurement, workholding, work holding deformation, data processing, nanopositioning, nano-positioning tools, micro-positioning tools, micro positioning tools, micromachining fixtures, micromachining positional errors, measurement of low to mid-spatial frequencies, measurement of low spatial frequencies, new tools in nanometrology industry, new tools in nanometrology production, new tools in nanometrology manufacturing, new techniques for surface finish measurement, new techniques for on machine measurement, new tools for surface finish measurement, new techniques for ultraprecision surface finish measurement, ultraprecision surface finish measurement, measuring ultraprecision surfaces, measuring ultra precision surfaces, tools for measuring ultraprecision surface finish, tools for measuring ultraprecision form error, measuring ultraprecision form error, form error measurements in ultraprecision single point diamond turning |
| Publication Date: | 2016 |
| Abstract: | Ultraprecision single point diamond turning is required to produce parts with sub-nanometer surface roughness and sub-micrometer surface profiles tolerances. These parts have applications in the optics industry, where tight form accuracy is required while achieving high surface finish quality. Generally, parts can be polished to achieve the desired finish, but then the form accuracy can easily be lost in the process rendering the part unusable. Currently, most mid to low spatial frequency surface finish errors are inspected offline. This is done by physically removing the workpiece from the machining fixture and mounting the part in a laser interferometer. This action introduces errors in itself through minute differences in the support conditions of the over constrained part on a machine as compared to the mounting conditions used for part measurement. Once removed, the fixture induced stresses and the part’s internal residual stresses relax and change the shape of the generally thin parts machined in these applications. Thereby, the offline inspection provides an erroneous description of the performance of the machine. This research explores the use of a single, high resolution, capacitance sensor to quickly and qualitatively measure the low to mid spatial frequencies on the workpiece surface, while it is mounted in a fixture on a standard ultraprecision single point diamond turning machine after a standard facing operation. Following initial testing, a strong qualitative correlation exists between the surface profiling on a standard offline system and this online measuring system. Despite environmental effects and the effects of the machine on the measurement system, the capacitive system with some modifications and awareness of its measurement method is a viable option for measuring mid to low spatial frequencies on a workpiece surface mounted on an ultraprecision machine with a resolution of 1nm with an error band of ±5nm with a 20kHz bandwidth. |
| URI: | http://hdl.handle.net/11375/20604 |
| Appears in Collections: | Open Access Dissertations and Theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Gomersall_Fiona_R_201609_MASc.pdf | 8.28 MB | Adobe PDF | View/Open |
Items in MacSphere are protected by copyright, with all rights reserved, unless otherwise indicated.
