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A Study of the Mechanical Properties of Silicon-Based Thin Films Deposited by ECR-PECVD and ICP-CVD | 788 |
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A Study of the Mechanical Properties of Silicon-Based Thin Films Deposited by ECR-PECVD and ICP-CVD | 34 | 11 | 16 | 15 | 10 | 11 | 7 |
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