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A Study of the Mechanical Properties of Silicon-Based Thin Films Deposited by ECR-PECVD and ICP-CVD | 953 |
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A Study of the Mechanical Properties of Silicon-Based Thin Films Deposited by ECR-PECVD and ICP-CVD | 17 | 25 | 13 | 4 | 13 | 5 | 9 |
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