Browsing by Subject amorphous silicon, silicon rich silicon oxide
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| Publication Date | Title | Author(s) |
|---|---|---|
| 2005 | Characterization of Amorphous Silicon (α-Si) and Silicon Rich Silicon Oxide (SiOx) Materials Produced by ECR-PECVD | Roschuk, Tyler |
Showing results 1 to 1 of 1
