Browsing by Subject ECR-PECVD
Showing results 1 to 3 of 3
| Publication Date | Title | Author(s) |
|---|---|---|
| Aug-2006 | Coupled Luminescence Centres in Erbium-Doped Silicon Rich Silicon Oxide Thin Films Deposited by ECR-PECVD | Earl Blakie, Darren |
| 2012 | Installation of a New Electron Cyclotron Plasma Enhanced Chemical Vapour Deposition (ECR-PECVD) Reactor and a Preliminary Study ofThin Film Depositions | Dabkowski, Ryszard P. |
| 2020 | Optical and Electrical Properties of Ce Doped Silicon Based Thin Films | Gao, Yuxuan |
